Feitor, Michelle CequeiraLinhares, Álvaro Albueno da Silva2025-10-022025-10-022025-06-02LINHARES, Álvaro Albueno da Silva. Obtenção e estudo do comportamento dos filmes finos multicamadas TiSiN/TiSiC depositados em aço AISI 4340 usando a técnica de deposição por plasma em cilindros catódicos. Orientadora: Dra. Michelle Cequeira Feitor. 2025. 80f. Dissertação (Mestrado em Engenharia Mecânica) - Centro de Tecnologia, Universidade Federal do Rio Grande do Norte, Natal, 2025.https://repositorio.ufrn.br/handle/123456789/65709Thin films are layers applied to enhance substrate properties, such as resistance and durability. The plasma treatment technique in cathodic cylinders (CCyPD) is innovative, but there are no records in the literature regarding the application of multilayer thin films with this technique, making this study pioneering in exploring this approach. In this context, the objective of this study was to obtain and characterize TiSiN/TiSiC multilayer thin films, deposited on AISI 4340 steel substrate by the CCyPD method. The plasma treatment was carried out using titanium (Ti) and silicon (Si) cylinders, applying a fixed potential while varying the time, temperature, and gas ratio for each deposited layer. After treatment, the samples were analyzed using characterization techniques, including: X-ray diffraction (XRD) with grazing incidence, Raman spectroscopy, Field Emission Scanning Electron Microscopy (FESEM) coupled with Energy Dispersive Spectroscopy (EDS), microhardness and tribological tests (friction coefficient and wear volume), and profilometry analysis to evaluate surface roughness. The results showed that the deposited layers exhibited the typical composite phases of multilayers, with the corresponding vibrational bands detected by Raman spectroscopy. FEG-SEM confirmed that the coating consisted of alternating TiSiN/TiSiC layers, with good adhesion to the substrate. The EDS analysis revealed the elemental composition of the multilayers, containing Ti, Si, N, and C. The mechanical properties indicated a significant increase in hardness in the coated samples, while in terms of tribological performance, the multilayer films exhibited low friction coefficients and reduced wear compared to the uncoated substrate. The results demonstrated that the multilayers exhibited high hardness, low friction coefficient, and increased wear resistance compared to the uncoated substrate. It is concluded that the CCyPD technique was effective in depositing multilayer thin films, showcasing its potential to enhance substrate properties and contribute to the development of high-performance coatings.pt-BRAcesso AbertoMulticamadasTiSiN/TiSiCCilindros catódicosComportamento tribológicomasterThesisENGENHARIAS::ENGENHARIA MECANICA