Santos, Edson José da CostaAlmeida, Edalmy Oliveira deSilva, Bruno Felipe Costa daGuerra, Paulo Victor de AzevedoHékis, Hélio RobertoCoutinho, Karilany DantasAlves Júnior, ClodomiroGuerra Neto, Custódio Leopoldino de Brito2020-07-102020-07-102015SANTOS, E. J. C.; OLIVEIRA, E. A.; SILVA, B. F. C.; GUERRA, P. V.A.; HEKIS, H. R.; COUTINHO, K. D.; ALVES JÚNIOR, C.; GUERRA NETO, C. L. B.. Caracterização de câmara para pós-descarga de cátodo ôco à baixa pressão. Revista Brasileira de Inovação Tecnológica em Saúde, v. 5, p. 1, 2015. Disponível em: https://periodicos.ufrn.br/reb/article/view/7252. Acesso em: 08 jul. 2020. https://doi.org/10.18816/r-bits.v5i2.72522236-1103https://repositorio.ufrn.br/jspui/handle/123456789/29543Many applications require that the plasma discharge is produced apart from the surface to be processed, thus preventing damage caused by bombardment and/or plasma radiation. In the post-discharge regime in various applications thermally sensitive materials can be used. Thus, knowledge of the characteristics of electrical discharge (optically active species and chemical composition of the plasma) is essential for efficiency and control treatment. The aim of this study was to characterize the hollow cathode discharge and post-DC glow discharge to evaluate the production of active species plasma. The discharge was produced using argon and nitrogen gases at pressure of 0.05 Pa, the gas flow range varying from 1 to 6 cm3 /min and electric current between 150 to 600 mA. Measurements of optical emission spectroscopy and mass spectrometry were made to characterize some species of the discharge. The results showed that the density of ions inside the hollow cathode, with 2 mm diameter ranged between 7.71 and 14.1 x 1015 cm-3. It was observed that the gas flow and the electric current changes the emission intensity of Ar and N2 species. The major ionic species detected by quadrupole mass spectrometry were Ar+ and N2+. The ratio of optical emission intensities of N2 (1 +)/Ar (811 nm) was related to the partial pressure of N2 after the hollow cathode discharge at low pressurePós-descargaEspectroscopia de emissão ópticaEspectrometria de massa quadrupolararticle10.18816/r-bits.v5i2.7252