Oliveira, Alexandre Barbosa deRibeiro, Gilberto MedeirosCosta, Antonio Azevedo da2020-04-292020-04-292009-08-04OLIVEIRA, Alexandre Barbosa de; Medeiros-Ribeiro, G ; Azevedo, A. Submicron fabrication by local anodic oxidation of germanium thin films. Nanotechnology (Bristol), v. 20, p. 345301, 2009. ISSN 1742-6596 versão online. DOI https://doi.org/10.1088/0957-4484/20/34/345301. DisponÃvel em: https://iopscience.iop.org/article/10.1088/0957-4484/20/34/345301. Acesso em: 29 abr. 2020.1742-6588 (print), 1742-6596 (online)https://repositorio.ufrn.br/jspui/handle/123456789/28845Submicron fabricationAnodic oxidationGermanium thin filmsSubmicron fabrication by local anodic oxidation of germanium thin filmsarticle10.1088/0957-4484/20/34/345301