Estudo da viabilidade da técnica de plasma em descarga de gaiola catódica para obtenção de filmes de TiN para revestimentos biocompatíveis

Abstract

The titanium nitride films increase the biocompatibility of biomedical alloys. These films have already been for this application. The deposition for plasma in discharge of cathodic cage is a dual technique that alloys both nitriding and films deposition. In this work, it was studied the feasibility of plasma in discharge of cathodic cage to obtain of titanium nitride films for biomedical applications. It was made two catohodic cages, differing by number of holes in the lid. The samples were characterized by X-ray diffraction with grazing incidence angle, transmittance, optical microscopy and scanning electronic microscopy. TiN films with high crystallinity are obtained with both cathodic cages. The TiN film obtained with cathodic cage with more holes in the lid is thicker, this prove that with more holes in the lid the deposition process is more efficient